大家在查：失能地面效应人体电阻美容仪共用天线系统国际紫外探测器太阳辐射监测卫星基波频率微波功率计射频功率计

极紫外

网络EUV; Extreme Ultraviolet; EUVL

极紫外

极紫外

极紫外

EUV

尽管极紫外（EUV）设备、掩模和工艺成本在NGL中较高，同时还有诸多待攻克的技术难关，但这些难关一旦被攻破，应用EUV…

Extreme Ultraviolet

【摘要】：极紫外(Extreme Ultraviolet)探测器主要通过探测地球等离子层中的He+离子散射出的30．4nm的极紫外光来探测出 …

EUVL

...研究，在近几年内迅速升温，这些技术包括X射线光刻、极紫外(EUVL)即软X射线投影光刻、电子束投影光刻、离子束投影光 …

1

The chirped multilayer mirror in the extreme ultraviolet region can be used to select some high harmonics and compensate the chirp .

具有谐波选择和啁啾补偿作用的极紫外啁啾多层膜反射镜是产生亚飞秒脉冲的有效元件。

2

Combination of surface characterization techniques for analyzing the roughness of the substrate

极紫外多层膜基底表面粗糙度综合表征技术

3

Extremely Ultraviolet Lithography Fabrication Technology for Nanometer ULSI Devices

制备纳米级 ULSI 的极紫外光刻技术

4

Study of Ultraviolet and Soft X-Ray Varied Line-Space Plane Grating Monochromator

极紫外、软 X-射线变线距平面光栅单色仪的研究

5

Design and Simulation of a Wafer Stage for Extreme Ultra Violet Lithography

极紫外光刻机工件台设计及仿真

6

Researches on extreme ultraviolet multilayers fabrication

极紫外多层膜制备工艺研究

7

Measurement of angles between channels for an extreme ultra-violet telescope

极紫外望远镜各通道夹角的测量

8

Multilayers on Extreme Ultraviolet Lithography Masks and Illumination Error

极紫外投影光刻掩模的多层膜与照明误差

9

Research on Vacuum Stage Technologies for Extreme Ultraviolet Lithography

极紫外光刻真空工件台技术研究

10

Control of residual stress in extreme ultraviolet multilayer coatings

极紫外多层膜残余应力初步研究

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