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RFCO2

RFCO2

RFCO2

RFCO2

1

The characteristic of RF CO2 laser and its ceramic substrate scribing are presented .

介绍了 RFCO2 激光器及其陶瓷基板划片的特点；

2

The mechanism of scribing ceramic substrate by using RF CO2 laser is analyzed . The design of the scribing system is presented .

分析了 RFCO2 激光陶瓷基板划片的机理，给出了整机总体设计方案。

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